BW-Series - Accurate sub-nano-surface profiler with non-contact measurement

Superior measurement performance

• Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
• Enables measurements with the same height resolution in a wide range of magnifications.
• Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
• Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible

SiC Wafer: Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer

Nano-level measurement of razor-edge with high-magnification lens

Subject: Razor-edge

Surface roughness of paper (Synthetic, Plain, Gloss, Matte)

Surface roughness of synthetic paper
Surface roughness of gloss paper
Surface roughness of plain paper
Surface roughness of matte paper
 

Surface roughness of ceramics

Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

IC package: Micrometer-range measurement in a wide range of magnifications

Height calibration with the NIST-certified VLSI standard

BW-D501 system