| Controller | Pro Scan III |
| Computer Interface | 1 x USB 2.0 (HID or Virtual COM) 2 x RS232 |
| Stage Speed | Up to 300mm/s |
| Step Size | From 0.01um for XY, 0.002um for Z |
| Repeatability (Focus/Stages) | Typically <1um |
| Linear Scales | 0.1um or 0.05um options available |
| Ball Screws | Zero Backlash, ground recirculation, ball screws, 1mm, 2mm, 4mm or 5mm options available. |
| Limit Switches | Adjustable in X and Y ,Optical and mechanical available in Z |
| Dimensions | 177mm x 177mm x 177mm |
| Controller Weight | 3kg (1kg for ancillary box) |