| Max kV | 130 kV |
|---|---|
| Max. electron beam power | 10 W |
| X-ray source | Open tube transmission target |
| Focal spot size | 3 µm1 (below 2 W) |
| Defect recognition capability | 2 µm |
| Geometric magnification | 2,046x |
| System magnification | Up to 36,000x |
| Imaging system (Option) | Varex 1313DX (1 Mpixel, 16-bit) Flatpanel |
| Manipulator | 4-axis (X, Y, Z, T) |
| Rotate axis | Optional |
| Tilt | 0 - 72 degrees |
| Measuring volume | Largest square in single map 406x406 mm Absolute max 711x762 mm |
| Max. sample weight | 5 kg (11 lbs) |
| Monitor | Single 4k IPS (3840x2160 pixels) |
| Cabinet dimensions (WxDxH) | 1200 x 1786 x 1916 mm |
| Weight | 1,935 kg (4,266 lbs) |
| Radiation safety | |
| Control | Inspect-X control and analysis software |
| Automation inspection | Optional |
| Computed Tomography | Optional CT and/or X.Tract |
| Applications | Real-time inspection of electronics (BGA, µBGA, flip-chip and loaded PCB boards) |